Title

Electron beam, x-ray, and-ion beam techniques for submicrometer lithographies V

Title Supplement

11 - 12 March 1986, Santa Clara, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1986

Series

Proceedings of SPIE; 632

ISBN

0-89252-667-X

Conference