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Title
Laser applications in microelectronic and optoelectronic manufacturing, LAMOM XVII
Title Supplement
23 - 26 January 2012, San Francisco, California, United States; Part of SPIE Photonics West
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2012
Series
Proceedings of SPIE; 8243
ISBN
978-0-8194-8886-2