Title

Micromachining and microfabrication process technology VII

Title Supplement

22 - 24 October 2001, San Francisco, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4557

ISBN

0-8194-4285-2

Conference