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Title
Optical metrology in production engineering
Title Supplement
27 - 30 April 2004, Strasbourg, France
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
European Optical Society -EOS-
Publisher
Publishing Place
Bellingham, WA
Publication Date
2004
Series
Proceedings of SPIE; 5457
ISBN
0-8194-5379-X