Title

Analytical Techniques for Semiconductor Materials and Process Characterization 5, ALTECH 2007

Title Supplement

September 13 - September 14, 2007, Munich, Germany

Person Involved

Corporate Author

Electrochemical Society -ECS-, Electronics and Photonics Division

Publisher

Publishing Place

Red Hook, NY

Publication Date

2007

Series

ECS transactions; 10.2007, Nr.1

ISBN

978-1-604-23825-9

Conference