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Title
Optical metrology and inspection for industrial applications
Title Supplement
18 october 2010, Beijing, China
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2010
Series
Proceedings of SPIE; 7855
ISBN
978-0-8194-8385-0