Title

26th European Mask and Lithography Conference

Title Supplement

18 - 20 January 2010, Grenoble, France

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2010

Series

Proceedings of SPIE; 7545

ISBN

978-0-8194-7941-9

Conference