English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Hauptwerk
Micromachining and microfabrication process technology II
Information
Publications
Export
Statistics
Options
Title
Micromachining and microfabrication process technology II
Titel Supplements
14-15 October 1996, Austin, Texas
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
1996
Serie
Proceedings of SPIE
Konferenz
Conference on Micromachining and Microfabrication Process Technology 1996