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Title
Micromachining and microfabrication process technology II
Title Supplement
14-15 October 1996, Austin, Texas
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
1996
Series
Proceedings of SPIE; 2879
ISBN
0-8194-2277-0