Title

23rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012. Proceedings

Title Supplement

May 15-17, 2012, Saratoga Springs, NY

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2012

ISBN

978-1-4673-0351-4

978-1-4673-0350-7

Conference