Title

29th European Mask and Lithography Conference. Proceedings

Title Supplement

25-27 June 2013, Dresden, Germany

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2013

Series

Proceedings of SPIE; 8886

ISBN

978-0-8194-9755-0

Conference