Options
Title
Gettering and defect engineering in semiconductor technology XIII, GADEST 2009
Title Supplement
Proceedings of the 13th international autumn meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009
Person Involved
Publisher
Publishing Place
Dürnten
Publication Date
2010
Series
Diffusion and defect data. B, Solid state phenomena; 156/158
ISSN
1012-0394
ISBN
978-3-908451-74-7