Title

Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII

Title Supplement

4 - 5 February 2013, San Francisco, California, United States

Editor(s)

Ramesham, Rajeshuni

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2013

Series

Proceedings of SPIE; 8614

ISBN

978-0-8194-9383-5

Conference