Title

EMLC 2005 : 21th European Mask and Lithography Conference. Proceedings

Title Supplement

31 January - 3 February 2005, Dresden, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2005

Series

Proceedings of SPIE; 5835

ISBN

0-8194-5830-9

Conference