Title

MEMS design, fabrication, characterization, and packaging

Title Supplement

30 May - 1 June 2001, Edinburgh, UK

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4407

ISBN

0-8194-4108-2

Conference