Title

Symposia on Elecrochchemical Processing in ULSI Fabrication and Interconnect and Contact Metallization: Materials, Processes and Reliability 1998. Proceedings

Person Involved

Corporate Author

Electrochemical Society -ECS-, Dielectric Science and Technology Division

Publisher

Publishing Place

Pennington, NJ

Publication Date

1999

Series

Electrochemical Society. Proceedings; 98-6

ISBN

1-566-77200-1

Conference