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Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
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Title
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Titel Supplements
San Diego, California, USA, 21 August 2011
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2011
Serie
Proceedings of SPIE; 8105
Konferenz
Conference "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors" 2011