Title

Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V

Title Supplement

San Diego, California, USA, 21 August 2011

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2011

Series

Proceedings of SPIE; 8105

ISBN

978-0-8194-8715-5

Conference