Title

Electron-beam, x-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V

Title Supplement

20-21 February 1995, Santa Clara, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1995

Series

Proceedings of SPIE; 2437

ISBN

0-8194-1785-8

Conference