Title

20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007. Technical Digest

Title Supplement
Kobe, January 21-25, 2007
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Publisher
Publishing Place
New York, NY
Publication Date
2007
ISBN
1-4244-0951-9
1-4244-0950-0
Conference