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Title
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2016
Title Supplement
September 6-8, 2016, Nuremberg, Germany
Person Involved
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Deutsche Forschungsgemeinschaft -DFG-, Bonn
Publisher
Publishing Place
Piscataway, NJ
Publication Date
2016
ISBN
978-1-5090-0818-6
978-1-5090-0816-2
978-1-5090-0819-3
978-1-5090-0817-9