Title

Microelectromechanical systems - materials and devices II

Title Supplement
Symposium held December 1 - 2, 2008, Boston, Massachusetts, U.S.A.; Symposium GG, "Microelectromechanical Systems - Materials and Devices II" which was held ... at the 2008 MRS fall meeting in Boston, Massachusetts
Person Involved
Corporate Author
Materials Research Society -MRS-
Publisher
Publishing Place
Warrendale, Pa.
Publication Date
2009
Series
Materials Research Society Symposium Proceedings; 1139
ISBN
978-1-60511-111-7
Conference