Title

EMLC 2008, 24th European Mask and Lithography Conference

Title Supplement

21 - 24 January 2008, Dresden, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2008

Series

Proceedings of SPIE; 6792

ISBN

978-0-8194-6956-4

Conference