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Title
EMLC 2008, 24th European Mask and Lithography Conference
Title Supplement
21 - 24 January 2008, Dresden, Germany
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-
Publisher
Publishing Place
Bellingham, WA
Publication Date
2008
Series
Proceedings of SPIE; 6792
ISBN
978-0-8194-6956-4