Title

EMLC 2007, 23rd European Mask and Lithography Conference

Title Supplement

22 - 25 January 2007, Grenoble, France

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2007

Series

Proceedings of SPIE; 6533

ISBN

978-0-8194-6655-6

0-8194-6655-7

Conference