Title

MEMS 2002. The 15th IEEE International Conference on Micro Electro Mechanical Systems. Technical digest

Title Supplement
Las Vegas, Nevada, USA, January 20 - 24, 2002
Corporate Author
IEEE Robotics and Automation Society
Publisher
Publishing Place
Piscataway, NJ
Publication Date
2002
ISBN
0-7803-7185-2
0-7803-7186-0
Conference