Title

Electron-beam x-ray and ion-beam technlogy. Submicrometer lithographies VIII

Title Supplement
1-3 March 1989, San Jose, California
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
1989
Series
Proceedings of SPIE; 1089
ISBN
0-8194-0124-2