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Title
MEMS, MOEMS, and Micromachining III. Proceedings
Title Supplement
Strasbourg, France, 9 April 2008
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2008
Series
Proceedings of SPIE; 6993
ISBN
9780819471918