English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Hauptwerk
Handbook of silicon based MEMS materials and technologies
Information
Publications
Export
Statistics
Options
Title
Handbook of silicon based MEMS materials and technologies
Titel Supplements
A volume in Micro and Nano Technologies, 3rd Edition
Verlag
Elsevier
Verlagsort
Amsterdam
Datum
2020