Title

Laser applications in microelectronic and optoelectronic manufacturing IV

Title Supplement
Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM-IV) at Photonics West '99, 25 - 27 January 1999, San Jose, California
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
1999
Series
Proceedings of SPIE; 3618
ISBN
0-8194-3088-9
Conference