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Title
Fifth International Symposium on Laser Precision Microfabrication
Title Supplement
11-14 May 2004, Nara, Japan
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2004
Series
Proceedings of SPIE; 5662
ISBN
0-8194-5623-3