English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Projekt
New Spatial Atomic layer deposition precursors and plasma processes towards functional materials for advanced applications
Export
Statistics
Options
REACTIVE
Fact Sheet
Results
Project Title
New Spatial Atomic layer deposition precursors and plasma processes towards functional materials for advanced applications
Funder
Agence Nationale de la Recherche -ANR-