Title

In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing

Title Supplement

19-21 May 1999, Edinburgh

Person Involved

Corporate Author

European Optical Society -EOS-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1999

Series

Proceedings of SPIE; 3743

ISBN

0-8194-3223-7

Conference