Title

Micromachined Devices and Components II

Person Involved

Corporate Author

Sandia National Laboratories, Albuquerque/N.Mex

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

National Institute of Standards and Technology -NIST-

Publisher

Publishing Place

Bellingham, WA

Publication Date

1996

Series

Proceedings of SPIE; 2882

ISBN

0-8194-2280-0

Conference