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  4. Advanced metallization and interconnect systems for ULSI applications in 1999. Proceedings of the conference
 
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Title

Advanced metallization and interconnect systems for ULSI applications in 1999. Proceedings of the conference

Person Involved
Corporate Author
Univ. of California, Continuing Education in Engineering
Publisher
MRS  
Publishing Place
Warrendale, Pa.
Publication Date
1998
ISBN
1-558-99412-2
Conference
Conference on Advanced Metallization and Interconnect Systems for ULSI Applications 1997  
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