Title

Atomic layer deposit applications 8

Title Supplement

Held during the PRiME 2012 joint international meeting; held in Honolulu, Hawaii, from October 7 to 12, 2012

Person Involved

Corporate Author

Electrochemical Society -ECS-

Publisher

Publishing Place

Pennington, NJ

Publication Date

2012

Series

ECS transactions; 50, 13

ISSN

1938-5862

ISBN

978-1-60768-361-2

978-1-62332-012-6

Conference