Title

EMLC 2006, 22nd European Mask and Lithography Conference

Title Supplement

23 - 26 January 2006, Dresden, Germany

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2006

Series

Proceedings of SPIE; 6281

ISBN

0-8194-6356-6

Conference