Title

Micro- and nanoelectronics 2007

Title Supplement

1 - 5 October 2007, Zvenigorod, Russia; Selected papers presented at the International Conference on Micro- and Nanoelectronics 2007 (ICMNE-2007)

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2008

Series

Proceedings of SPIE; 7025

ISBN

978-0-8194-7238-0

Conference