Title

IEEE International Interconnect Technology Conference, IITC 2021

Title Supplement

Virtual Conference, July 6-9, 2021

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

IEEE Electron Devices Society

Japan Society of Applied Physics -JSAP-

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2021

ISBN

978-1-7281-7633-8

978-1-7281-7632-1

Conference