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Title
IEEE 23rd International Conference on Micro Electro Mechanical Systems, MEMS 2010
Title Supplement
Wanchai, Hong Kong, China, 24 - 28 January 2010
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Publisher
Publishing Place
Piscataway, NJ
Publication Date
2010
ISBN
978-1-4244-5761-8
978-1-4244-5764-9