Title

ISSM 2007, 2007 International Symposium on Semiconductor Manufacturing. Conference proceedings

Title Supplement

October 15 - 17, 2007, Santa Clara Marriott, Santa Clara, California

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

IEEE Electron Devices Society

Components, Packaging and Manufacturing Technology Society -CPMT-

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2007

ISBN

1-424-41141-6

978-1-424-41141-2

Conference