Title

Advancing the science and technology of semiconductor manufacturing excellence. ASMC 2004 Proceedings

Title Supplement

ASMC 2004, The 15th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, May 4-6, 2004, Boston, USA

Person Involved

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2004

ISBN

0-7803-8312-5

Conference