Title

27th European Mask and Lithography Conference 2011

Title Supplement

18 - 19 January 2011, Dresden, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2011

Series

Proceedings of SPIE; 7985

ISBN

978-0-8194-8553-3

Conference