Title

EMLC 2006, 22nd European Mask and Lithography Conference

Title Supplement

Lectures held at the GMM-conference January 23 - 26, 2006 in Dresden, Germany

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Berlin

Publication Date

2006

Series

GMM-Fachbericht; 49

ISBN

3-8007-2931-8

978-3-8007-2931-9

Conference