Title

Optical microlithography XXVII

Title Supplement
25 - 27 February 2014, San Jose, California, United States; Selected papers presented at the 27th Optical Microlithography Conference (OM XXVII) held as part of the SPIE Advanced Lithography Symposium 2014
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2014
Series
Proceedings of SPIE; 9052
ISBN
978-0-8194-9975-2
Conference