Title

Photomask Technology 2012

Title Supplement

11 - 13 September 2012, Monterey, California, United States; held as part of the 32nd International Symposium on Photomask Technology

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

BACUS International

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8522

ISBN

978-0-8194-9260-9

Conference