Title

Photomask Technology 2011

Title Supplement

19 September 2011, Monterey, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2011

Series

Proceedings of SPIE; 8166

ISBN

978-0-8194-8791-9

Conference