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Title
Optical Micro- and Nanometrology III
Title Supplement
13 - 16 April 2010, Brussels, Belgium
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2010
Series
Proceedings of SPIE; 7718
ISBN
978-0-8194-8191-7