Title

Metrology, inspection, and process control for microlithography XX

Title Supplement

20 - 23 February 2006, San Jose, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2006

Series

Proceedings of SPIE; 6152

ISBN

0-8194-6195-4

Conference