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Title
DTIP of MEMS & MOEMS : design, test, integration and packaging of MEMS/MOEMS 2006
Title Supplement
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS ; 26 - 28 April 2006, Stresa, Lago Maggiore, Italy
Person Involved
Corporate Author
Tima-Cmp Laboratory
Publisher
Publishing Place
Grenoble
Publication Date
2006
ISBN
2-916187-03-0