Title

Reliability, packaging, testing, and characterization of MEMS/MOEMS V

Title Supplement

25 - 26 January 2006, San Jose, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2006

Series

Proceedings of SPIE; 6111

ISBN

0-8194-6153-9

Conference