Title

Micro- and nanoelectronics 2003

Title Supplement

6 - 10 October 2003, Zvenigorod, Russia ; ICMNE-2003

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2004

Series

Proceedings of SPIE; 5401

ISBN

0-8194-5324-2

Conference