Title

Optomechatronic Micro/Nano Components, Devices, and Systems

Title Supplement

27 - 28 October 2004, Philadelphia, Pennsylvania, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2004

Series

Proceedings of SPIE; 5604

ISBN

0-8194-5557-1

Conference